Selenium, Python, Ubuntu server, DevToolsActivePort file doesn't exist error. How to fix?

Question

Python

Hello.
An interesting situation.

Brief process:
Start Xvfb
Create webdriver.Chrome with the following parameters:

options = webdriver.ChromeOptions()
options.add_argument("--disable-blink-features")
options.add_argument("--disable-blink-features=AutomationControlled")
options.add_argument("--window-size=1920,1080")
options.add_argument("--no-sandbox")
options.add_argument('--proxy-server=%s' % proxy)

Ps It is necessary that the browser opens, because. then you need to click on the buttons and links in the test. With these parameters, everything worked perfectly before.

The whole thing fails with an error: DevToolsActivePort file doesn't exist
Google Chrome and ChromeDriver of the same version - 97
Interestingly, on a server rented by small dances with a tambourine, it was possible to implement the plan earlier. On a virtual machine (VirtualBox), in no way!
Addendum

options.add_argument('--headless')
options.add_argument("--disable-dev-shm-usage")

Does not help!

You can find somewhere the launch log of this whole thing to build on it. Because with this error there can be many different variations of missed things and required fixes.